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1600°C Vacuum Atmosphere Tube Furnace CVD System
1600°C Vacuum Atmosphere Tube Furnace CVD System

1600°C Vacuum Atmosphere Tube Furnace CVD System

1600°C vacuum/atmosphere tube furnace CVD system (CVD-TF) provides an experimental environment with vacuum, controllable atmosphere and high temperature, and is used in semiconductor, nanotechnology, fiber and other fields. This CVD growth system is suitable for CVD process , such as silicon carbide coating, ceramic substrate conductivity test, controllable growth of ZnO nanostructure, ceramic capacitor (MLCC) atmosphere sintering and other experiments.
  • ModelCVD-LTF16P/ CVD-LTF16T Series
  • BrandLABOAO
  • PortAny port in China
  • PackagePlywood case package
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DESCRIPTION

1600°C vacuum/atmosphere tube furnace CVD system (CVD-TF) provides an experimental environment with vacuum, controllable atmosphere and high temperature, and is used in semiconductor, nanotechnology, fiber and other fields. This CVD growth system is suitable for CVD process , such as silicon carbide coating, ceramic substrate conductivity test, controllable growth of ZnO nanostructure, ceramic capacitor (MLCC) atmosphere sintering and other experiments.

FEATURES

1.The furnace is made of polycrystalline mullite fiber vacuum adsorption, the temperature field is uniform and energy saving is more than 50%

2.The self-developed air diversion and heat insulation technology ensures the service life and constant temperature effect of each component in the box

3.When the electric furnace is started, the exhaust fan will automatically run at the same time. After the test, the exhaust fan will continue to run until the temperature of the furnace body is lower than 60 °C, and the exhaust fan will stop automatically, which effectively protects the surface of the furnace body.

4.The furnace door is opened with automatic power-off, over-temperature protection function, and leakage protection function to ensure the safety of use.

5.The circuit adopts continuous heating output mode, dual-circuit power supply, and separate wiring of strong and weak current improves the stability of the system

6.The heating module adopts DC signal to adjust the output power, which avoids the interference of induced electricity to the control signal.

7.Low-voltage metal buttons are used for operation buttons, with status indicator lights, safe and intuitive operation.

8.The upper and lower furnace bodies are connected by aviation plugs, which are safe, reliable and convenient to connect.

9.The gas circuit assembly is made of food grade 316 stainless steel, which has corrosion resistance, atmospheric corrosion resistance and high temperature resistance, and is non-magnetic.

10.Adopt digital flow display instrument, cooperate with mass flow controller, collect data and control flow. It has the characteristics of good repeatability, fast response speed, stability and reliability. (Gas Mass Flow Control System)

11.Automatic control and manual control switching function, the automatic control mode can automatically open/close the vacuum pump through the set value, so that the container can be kept within a certain vacuum pressure range. Manual control mode uses the user to directly operate the vacuum pump via the vacuum pump on/off button. to meet the needs of different experiments. (Medium vacuum control system)

12.The solenoid valve slow start technology makes the solenoid valve open 10 seconds after the vacuum pump is turned on, so that the system pressure in the furnace tube is kept accurate, and it also ensures that the exhaust gas will not return to the furnace tube system to affect the experimental effect (medium vacuum control system)

13.Overheating alarm, menu lock, overheating prevention, power recovery delay.

14.Using one-way valve technology, the gas flow is controlled within a controllable pressure range to ensure safety.

15.The gas mixing tank device is adopted, so that the gas can be introduced into the working room after being fully mixed to ensure that it will not leak.

SPECIFICATIONS

Model

CVD-LTF16P50

CVD-LTF16P60

CVD-LTF16P80

CVD-LTF16P100

CVD-LTF16P60S

CVD-LTF16P80S

CVD-LTF16P100S

CVD-LTF16T50

CVD-LTF16T60

CVD-LTF16T80

CVD-LTF16T100

CVD-LTF16P60S

CVD-LTF16T80S

CVD-LTF16T100S

Operating temperature   range

300~1600℃

Temperature   resolution

1℃

Temperature   control

± 1℃

Heating rate

0~20℃/min

Heating zone   length

260mm

600mm

Length of   constant temperature zone

120mm

300mm

degree of   vacuum

-0.1MPa

Empty   furnace heating time

<15min

Exterior

Cold-rolled   steel sheet with chemical-resistant coating on the surface

Furnace body

Polycrystalline   Mullite Fiber

Furnace size

440*390*330

780*390*330

Furnace tube

Corundum   Tube

Furnace tube   size

φ50*1000

φ60*1000

φ80*1000

φ100*1000

φ60*1200

φ80*1200

φ100*1200

Heater

Silicon   molybdenum rod

Heating   power

4KW

4KW

10KW

10KW

Thermal   insulation layer

Double-layer   forced air diversion

Controller

P: Imported   program temperature control digital display; T: 7-inch color touch screen   program temperature control

Control   method

Use   microcomputer PID control / S-type dual temperature zone separate temperature   control

How to set

P: Touch the   five buttons for action, digital display setting; T: Touch the finger to set

Display   method

P:   Double-line LED digital display; T: Color LCD display

Timing

0~999.9   hours

Run function

Fixed value   operation, program operation

Program mode

P: Program running,   4 curves, 40 steps in total; T: 50 steps can call the stored program

Sensor

Type S   thermocouple

Auxiliary   function

P:   Correction function; T: Correction function, real-time curve recording, U   disk data export

Safety   equipment

Overcurrent   leakage protection switch

Overcurrent   protection switch

Number of   air paths

3 channels   (the number of air channels can be selected according to specific needs)

Flow range

0-0500sccm   (standard ml/min, optional) nitrogen standard

Precision

±1%F.S

Response   time

≤4s

Operating   temperature (flow meter)

5-45℃

Work   pressure

Inlet   pressure 0.05-0.3MPa (gauge pressure)

System   connection

Adopt KF   quick connection bellows, high vacuum manual flapper valve and digital   display vacuum measuring instrument

System   vacuum range

10-100Pa

Vacuum pump

The   theoretical ultimate vacuum degree of the two-stage mechanical pump is 3x10-1Pa,   the pumping rate is 4L/s, the air outlet is equipped with an oil filter, the   rated voltage is 200V, and the power is 0.55Kw

CVD system   configuration

1600 degree   vacuum tube furnace (optional single temperature zone, double temperature   zone) Multi-channel mass flow control system Vacuum system

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