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1200°C Open Type Vacuum Atmosphere Tube Furnace CVD System
1200°C Open Type Vacuum Atmosphere Tube Furnace CVD System

1200°C Open Type Vacuum Atmosphere Tube Furnace CVD System

Provide an experimental environment with vacuum, controllable atmosphere and high temperature, used in semiconductor, nanotechnology, carbon fiber and other fields. This CVD growth system is suitable for CVD processes, such as silicon carbide coating, ceramic substrate conductivity testing, controlled growth of ZnO nanostructures, and MLCC atmosphere sintering experiments.
  • ModelCVD-LTF12P/ CVD-LTF12T Series
  • BrandLABOAO
  • PortAny port in China
  • PackagePlywood case package
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DESCRIPTION

Provide an experimental environment with vacuum, controllable atmosphere and high temperature, used in semiconductor, nanotechnology, carbon fiber and other fields.

This CVD growth system is suitable for CVD processes, such as silicon carbide coating, ceramic substrate conductivity testing, controlled growth of ZnO nanostructures, and MLCC atmosphere sintering experiments.

FEATURES

1.The furnace is made of polycrystalline mullite fiber vacuum adsorption, the temperature field is uniform and energy saving is more than 50%

2.The self-developed air diversion and heat insulation technology ensures the service life and constant temperature effect of each component in the box

3.When the electric furnace is started, the exhaust fan will automatically run at the same time. After the test, the exhaust fan will continue to run until the temperature of the furnace body is lower than 60 °C, and the exhaust fan will stop automatically, which effectively protects the surface of the furnace body.

4.The furnace door is opened with automatic power-off, over-temperature protection function, and leakage protection function to ensure the safety of use.

5.The circuit adopts continuous heating output mode, dual-circuit power supply, and separate wiring of strong and weak current improves the stability of the system

6.The heating module adopts DC signal to adjust the output power, which avoids the interference of induced electricity to the control signal.

7.Low-voltage metal buttons are used for operation buttons, with status indicator lights, safe and intuitive operation.

8.The upper and lower furnace bodies are connected by aviation plugs, which are safe, reliable and convenient to connect.

9.The gas circuit assembly is made of food grade 316 stainless steel, which has corrosion resistance, atmospheric corrosion resistance and high temperature resistance, and is non-magnetic

10.Adopt digital flow display instrument, cooperate with mass flow controller, collect data and control flow. It has the characteristics of good repeatability, fast response speed, stability and reliability. (Gas Mass Flow Control System)

11.Automatic control and manual control switching function, the automatic control mode can automatically open/close the vacuum pump through the set value, so that the container can be kept within a certain vacuum pressure range. Manual control mode uses the user to directly operate the vacuum pump via the vacuum pump on/off button. to meet the needs of different experiments. (Medium vacuum control system)

12.The solenoid valve slow start technology makes the solenoid valve open 10 seconds after the vacuum pump is turned on, so that the system pressure in the furnace tube is kept accurate, and it also ensures that the exhaust gas will not return to the furnace tube system to affect the experimental effect (medium vacuum control system)

SPECIFICATIONS

Model

CVD-LTF12P50

CVD-LTF12P60

CVD-LTF12P80

CVD-LTF12P100

CVD-LTF12T50

CVD-LTF12T60

CVD-LTF12T80

CVD-LTF12T100

CVD-LTF12P50S

CVD-LTF12P60S

CVD-LTF12P80S

CVD-LTF12P100S

CVD-LTF12T50S

CVD-LTF12T60S

CVD-LTF12T80S

CVD-LTF12T100S

Operating temperature range

300-1200°C

temperature resolution

1°C

temperature accuracy

±1°C

Heating rate

0-20°C/min

Heating zone length

420mm

Length of constant temperature zone

Single temperature zone210mmDouble temperature zone280mm

maximum vacuum

-0.1MP3

Empty furnace heating time

≤15min

Heating rate when configuring furnace   tube

Below 500°C≤5°C/min 500-800≤ 10°C/min 800-1000≤5°C/min 1000-1200≤2t°C/min

Exterior

Cold-rolled steel sheets - surface   chemical resistant coating

Furnace body

Polycrystalline Mullite Fiber

Furnace size

Outsideφ240-550mmInnerφ120*420mm

Furnace tube

Quartz tube

Furnace tube size

φ50/43*1000

φ   60/53*1000

φ80/72*1000

φ   100/92*1000

Heater

Nickel-chromium-aluminum alloy wire   OCr27A17MO2

Heating power

Single temperature zone3KWDouble temperature zone3.2KW

Thermal insulation layer

Double-layer forced air diversion

Open way

Clamshell back flip (about 100   degrees)

Controller

P: Imported program temperature   control digital display; T: 7-inch color touch screen program temperature   control

Control method

Using microcomputer PID control /   S-type dual temperature zone single temperature control

Set type

P: Touch five buttons for action,   digital display setting; T: Finger touch and tap to set

Display method

P: double-line LED digital display; T:   color LCD display

Timing

0-999.9h

Run function

Fixed value operation. Program   operation

Program mode

P: Program running, 4 curves, a total   of 40 steps; T: Maximum 50 steps, the stored program can be called

Sensor

Type K thermocouple

Auxiliary function

P: Correction function; T: Correction   function, real-time curve recording, U disk data export

Safety equipment

Overcurrent leakage protection switch

Number of air paths

3 channels (the number of air channels   can be selected according to specific needs)

Flow range

0-0500sccm (Standard ml/min, optional)   Nitrogen standard

Precision

±1%F.S

Response time

≤4s

Operating temperature (flow meter)

5-45°C

Work pressure

Inlet pressure 0.05-0.3MPa (gauge   pressure)

System connection

Adopt KF quick connection bellows,   high vacuum manual flapper valve and digital display vacuum measuring   instrument

System vacuum range

10-100Pa

Vacuum pump

The theoretical ultimate vacuum degree   of the two-stage mechanical pump is 3×10-1Pa, the pumping rate is 4L/S, the   air outlet is equipped with an oil filter, the rated voltage is 200V, and the   power is 0.55Kw

CVD system configuration

1200 degree open vacuum tube furnace   (optional single temperature zone, double temperature zone) Multi-channel   mass flow control system twisted vacuum system

Furnace body dimensions

980mm*400mm*600mm

System Dimensions

770mm*580mm*778mm

Total system weight

210kg


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